Gas flow measurement in semiconductor production equipment, especially for low-leakage lines
| Measuring fluid |
Gases
Liquid (Equivalent to water：Density 1.0g/cm³,
Viscosity 1.0mPa・s) |
| Measuring range |
Air |
Min. 5 to 50 mL/min(nor)
Max. 6 to 60 L/min(nor) |
| Water |
Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min |
| ・ When selecting a fl ow range, refer to "Index& Quick Reference for P Series Purgemeters" (TG-S0001). |
| Range ability |
10 : 1 |
| Indication accuracy |
±3% F.S. |
| Fluid pressure |
Max. 0.8 MPa |
| Fluid temperature |
Max. 120ºC (Depends on the gasket material) |
| Material |
Wetted parts |
SCS14 (Standard), SUS316 (Electrolytically polished) |
| Tapered tube |
Heat-resistant glass |
| Gasket |
Fluoro rubber (Max. 120ºC)
Chloroprene rubber (Max. 80ºC)
・The maximum fl uid temperature for each gasket material may vary depending on usage and ambient conditions. |
| Mounting plate |
SUS304 |
| Cover |
Transparent PVC |
| Process Connection |
Rc : 1/4"(Standard), 1/8"
NPT : 1/4", 1/8"
SW : 1/4", 3/8"
VCR : 1/4", 3/8" |
| Mounting |
Lock nut mount on the panel front (Standard)
Bezel mounting |
| Mass |
approx. 0.6Kg |
